高真空 pump

高真空 pump

高真空 pump


LEYBOLD 

 
TURBOVAC 50 (without Compond Stage)

 TURBOVAC 361,361C ClassicLine



VARIAN

Turbo Pump

(1) Turbo-V81-M
Inlet flange: ISO63,KF40,CF4 1/2", CF2 3/4"
Base pressure: 5x10(-10) mbar(3.8x10(-10)Torr)
Rotational speed: 1350 Hz (max)

(2) Turbo-V81-T
Inlet flange: ISO63,KF40,CF4 1/2", CF2 3/4"
Base pressure: 5x10(-9) mbar(3.8x10(-9)Torr)
Rotational speed: 1350 Hz (max)

(3) Turbo-V301 Navigator
Inlet flange: ISO160,ISO100,CF6", CF8"
Base pressure: mechanical:< 5x10(-10) mbar
dry: <5x10(-9) mbar
Rotational speed: 56,000 rpm

(4) Turbo-V551 Navigator
Inlet flange: ISO160,ISO160-F bolted ,CF6",
CF8"
Base pressure: < 1x10(-10) mbar

(5) Turbo-V701 Navigator
Inlet flange: ISO200,ISO200-F bolted ,CF10"
Base pressure: < 1x10(-10) mbar
Rotational speed: 42,000 rpm

(6) Turbo-V1001 Navigator
Inlet flange: ISO160,ISO200,ISO200-F
bolted,ISO250, ISO250-F bolted,CF10"
Base pressure: < 1x10(-10) mbar
Rotational speed: 38,000 rpm


V70 &V250  turbo  pump


Navigator Controller for Turbo Pump

(1) Turbo-V81-AG Rack Controller
Input: 100,240 Vac
50/60 Hz

(2) Turbo-V301 Navigator Controller
Input voltages:Navigator controller, 24Vdc
Navigator controller, 120/220 Vac

(3) Turbo-V551,701,1001 Navigator Controllers
(1) V551: 120/220V-50/60Hz
(2) V701: 120/220V-50/60Hz
(3) V1001: 120/220V-50/60Hz



EDWARDS

turbo  pump  EXT 240D /300D/400D/STP