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前級真空 pump

前級真空 pump

前級真空pump


EDWARDS

XDS  6i /10i /15i /20i  渦捲式pump

RV 3 / RV5/RV8 /RV12  雙旋葉油式pump


VARIAN

Dry Scroll Pumps

(1) SH-110 Scroll pump  & SH-100 Scroll pump
Inlet connection: NW25
Ultimate pressure: 6.6x10(-2) mbar

(2) TriScroll 300
Inlet connection: NW25
Ultimate pressure: 1.3x10(-2) mbar

(3) TriScroll 600
Inlet connection: NW40
Ultimate pressure: 9.3x10(-3) mbar