高真空 pump
高真空 pump
VARIAN
Turbo Pump
(1) Turbo-V81-M
Inlet flange: ISO63,KF40,CF4 1/2", CF2 3/4"
Base pressure: 5x10(-10) mbar(3.8x10(-10)Torr)
Rotational speed: 1350 Hz (max)
Varian V81M turbo pump pn:
9698901 -ISO63
9698903 - CF4(1/2)''
9698902 - KF40
9698904 -CF2(3/4)"
Varian V81M controller pn:
9698988 - Rack controller 81-AG base
9698989 - Rack controller 81-AG RS232
9698990 - Rack controller 81-AG Profibus
9699538 - PCB 24 V
(2) Turbo-V81-T
Inlet flange: ISO63,KF40,CF4 1/2", CF2 3/4"
Base pressure: 5x10(-9) mbar(3.8x10(-9)Torr)
Rotational speed: 1350 Hz (max)
Varian V81T turbo pump pn:
9698905 - ISO63
9698907 - CF4(1/2)''
9698906 - KF40
9698908 - CF2(3/4)"
Varian V81T controller pn:
9698988 - Rack controller 81-AG base
9698989 - Rack controller 81-AG RS232
9698990 - Rack controller 81-AG Profibus
9699538 - PCB 24 V
(3) Turbo-V301 Navigator
Inlet flange: ISO160,ISO100,CF6", CF8"
Base pressure: mechanical:< 5x10(-10) mbar
dry: <5x10(-9) mbar
Rotational speed: 56,000 rpm
Varian V301 pump pn:
9698918 - ISO100
9698919 - CF6''
9698920 - ISO160
9698921 - CF8"
Varian V301 controller pn:
9698972 - 24vdc
9698973 - 120/220vdc
9699437 - 220V
9699537 - 110V
(4)Turbo-V551 Navigator
flange: ISO160,ISO100,CF6", CF8"
Base pressure: < 1x10(-10) mbar
Rotational speed: 42,000 rpm
Varian V551 pump pn:
9698922 - ISO160
9698923 - CF8"
9698924 - ISO100
9698925 - CF6"
Varian V551 controller pn:
9698976 - 120/220V
9699444 - 220V
9699544 -110V
(5) Turbo-V701 Navigator
Inlet flange: ISO200,ISO200-F bolted ,CF10"
Base pressure: < 1x10(-10) mbar
Rotational speed: 42,000 rpm
Varian V701 pump pn:
9698926 -ISO200
9698927 -CF10"
Varian V701 controller pn:
9698977 - 120/220V
9699445- 220V
9699545 -110V
(6) Turbo-V1001 Navigator
Inlet flange: ISO160,ISO200,ISO200-F
bolted,ISO250, ISO250-F bolted,CF10"
Base pressure: < 1x10(-10) mbar
Rotational speed: 38,000 rpm
Varian V1001 pump pn:
9698931 -ISO200
9698932 - CF10"
9698933 -ISO160
9698934 - ISO250
Varian V1001 controller pn:
9698978 - 120/220V
9699454 - 220V
9699554 - 110V
(7) Varian V70 turbo pump pn:
9699357 - ISO63
9699358 - CF4(1/2)''
9699359 - KF40
9699360 - CF2(3/4)"
Varian V70 controller pn:
9698970 - 24vdc
9698971 - 120/220vdc
9699405 - 220V
9699505 - 120V
(8) Varian V70D turbo pump pn:
9699361 - ISO63
9699362 - CF4(1/4)''
9699363 - KF40
9699364 - CF2(3/4)"
Varian V70D controller pn:
9698970 -24vdc
9698971- 120/220vdc
9699405 - 220V
9699505-120V
Varian V250 turbo pump pn:
9699007 - ISO100
9699008 - CF6"
Varian V250 controller pn:
9699504 - 100-240V
另有 V-60, V-70 series,V-81 series,
V-150,V141, V-250
, V-300HT, V-550 turbo pump
Navigator Controller for Turbo Pump
(1) Turbo-V81-AG Rack Controller
Input: 100,240 Vac
50/60 Hz
(2) Turbo-V301 Navigator Controller
Input voltages:Navigator controller, 24Vdc
Navigator controller, 120/220 Vac
(3) Turbo-V551,701,1001 Navigator Controllers
(1) V551: 120/220V-50/60Hz
(2) V701: 120/220V-50/60Hz
(3) V1001: 120/220V-50/60Hz
LEYBOLD
TURBOVAC 50 (without Compond Stage)
TURBOVAC 361,361C ClassicLine
EDWARDS
turbo pump EXT 240D /300D/400D/STP